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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH1090356(A)
申请公布日期
1998.04.10
申请号
JP19960243426
申请日期
1996.09.13
申请人
KAWASAKI STEEL CORP
发明人
MATSUKAWA TOYOHISA
分类号
G01R31/28;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
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地址
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