| 摘要 |
PROBLEM TO BE SOLVED: To improve the detection sensitivity of an angular velocity by supporting one edge of a vibrator with a fixed member, providing a distortion detection means at the edge, and detecting the distortion of a vibrator due to Coriolis force. SOLUTION: A drive force due to Lorentz force is generated at a magnet 12 due to a coil 20, the vibration displacement between a vibrator 11 being vibrated by a photo reflector 21 and the magnet 12 is optically detected, and a coil current is controlled stably with a constant amplitude. When a swing is applied to the vibrator 11 around z axis through a pedestal 18, a Coriolis force that is proportional to a mass, an excitation piece, and an angular velocity Q is generated in x-axis direction. The Coriolis force is transferred to a detection piece 11b via a flange (c) and the detection piece 11b is distorted in x-axis direction. An electric charge being generated at piezoelectric ceramics 13 and 14 being provided near the fixed edge of the detection piece 11b is taken out as a signal, thus obtaining the angular velocity Q around z axis, thus improving sensitivity and stability for detecting the angular velocity Q. |
