| 摘要 |
<p>PROBLEM TO BE SOLVED: To precisely measure a chemical state on the basis of the composition on the surface of a sample as an insulating film and on the basis of the shape of an Auger electron spectrum, by a method wherein a side groove is formed around a region to be analyzed on the surface of the sample and an electric charge on the surface of the region to be measured is prevented. SOLUTION: By using an ion beam of a light laser beam, a side groove 3 for prevention of an electric charge is formed on the surface of an insulating film 2 formed on a substrate 1. A material for the substrate 1 is stuck to the inner wall of the side groove 3 when the beam is sputtered. Then, when an electron probe 4 is incident on a region 5 to be analyzed, the electric charge which is accumulated on the surface of the insulating film 2 can be discharged to the substrate 1 via the material which is stuck to the inner wall of the side groove 3. Consequently, it is possible to prevent the electric charge stored on the surface of the region 5 to be analyzed, and an Auger electron spectrum can be measured precisely.</p> |
