Verfahren zur Herstellung piezoelektrischer Aktoren

摘要

The present invention relates to a method for producing a plurality of piezoelectric actuators (1), wherein said method comprises the steps of: producing films (10) made of a piezoelectric ceramic material; covering one surface at least of the films (10) with electrodes (3); piling up and compressing the films (10) into a stack; sintering the stacked films (10); and separating the stack into individual actuators (1). When the films are stacked, the cavities (11) of said films (10) are accurately aligned on each other.