发明名称 |
Verfahren und Vorrichtung zur Behandlung eines sehr kleinen Bereichs einer Probe |
摘要 |
<p>An image of a specimen which is to be processed is detected by a near-field optical scanning microscope. An image with extremely high resolution for identifying a minute portion of several tens nm is detected. The detected minute portion is processed by, for example, a tunnel current of a scanning tunneling microscope. &lt;IMAGE&gt;</p> |
申请公布号 |
DE69131528(T2) |
申请公布日期 |
2000.05.04 |
申请号 |
DE1991631528T |
申请日期 |
1991.05.28 |
申请人 |
HITACHI, LTD. |
发明人 |
YAMAGUCHI, HIROSHI;NOGUCHI, MINORI;KOHNO, MAKIKO;NAKATA, TOSHIHIKO |
分类号 |
G01Q10/00;G01Q30/02;G01Q30/16;G01Q60/12;G01Q60/18;G01Q60/22;G01Q60/56;G01Q70/10;H01J37/28;(IPC1-7):G02B21/00;H01L21/30;G01N21/17;G01N27/00 |
主分类号 |
G01Q10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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