| 摘要 |
PROBLEM TO BE SOLVED: To reduce a measurement error to the utmost in X-ray stress measurement. SOLUTION: This X-ray stress measuring instrument is equipped with an X-ray tube 3 for generating an X-ray, parallel slits 5' for passing the X-ray from the X-ray tube 3, and allowing the X-ray to enter a sample 4, and PSD 1 for detecting the diffracted X-ray from the sample 4. In the measuring instrument for measuring the stress of the sample 4 based on the angle of diffraction of the diffracted X-ray, the number of slits of the parallel slits 5' is set at two in which the measurement error is minimized.
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