METHOD AND DEVICE FOR LASER ANNEALING

摘要

A method and a device for laser annealing capable of uniformly irradiating a beam, wherein only the beam having a Gaussian distribution excluding portions with high light-intensity can be formed in a linear sectional shape by an optical system (57) by rotating, a specified angle, the beam (41) from a laser beam source by a rotating means (42) even if a nonuniform intensity distribution is present in the beam pattern of the beam (41) from the laser beam source, whereby the beam can be irradiated uniformly to a specimen (50).