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摘要
申请公布号
JP3662767(B2)
申请公布日期
2005.06.22
申请号
JP19990112000
申请日期
1999.04.20
申请人
发明人
分类号
H01L27/04;H01L21/205;H01L21/822;H01L21/8242;H01L27/108;(IPC1-7):H01L21/824
主分类号
H01L27/04
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