| 摘要 |
A micro-electromechanical actuator includes a substrate. Register, gate and drive transistor circuitry is positioned on the substrate. An elongate actuator arm is fast, at a first end, with the substrate. The elongate actuator arm includes a mechanical layer and a heater layer interposed between the mechanical layer and the substrate. The heater layer defines a heating circuit that expands and contracts longitudinally when heated and subsequently cooled, resulting in reciprocal movement of the actuator arm away from and towards the substrate. A working member is fast with a second end of the actuator. The register, gate and drive transistor circuitry are interposed between the heater layer and the substrate.
|
