| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a filter apparatus which can be miniaturized without lowering adsorbing ability of a filter body, nor increasing pressure drop. <P>SOLUTION: This filter apparatus has: the filter body 60 formed with a lot of small holes penetrated and extended from one end face to the other end face located on the opposite side; a casing 53 housing the filter body in a state in which spaces opening the one end face and the other face with the small holes opened are formed; and partition members 54a, 54b at least one of which is disposed in at least one of a first space 71a with the one end face opened thereon and a second space 71b with the other end face opened thereon, and partitioning the spaces into partitioned spaces 72a, 72b, 73a and 73b. A return passage 70 reciprocating between the first and second spaces 71a, 71b is formed in the casing 53. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
