| 摘要 |
A semiconductor manufacturing apparatus is provided to prevent the malfunction of a suction valve due to air hunting and to restrain a coating failure by checking the air hunting in a chemical supply pipe using an air detecting sensor. A semiconductor manufacturing apparatus includes a supply pipe for supplying chemicals, a suction valve in the supply pipe, and a nozzle for spraying the chemicals onto a wafer at one end portion of the supply pipe. The suction valve is composed of a first air speed controller(132), a second air speed controller(135) spaced part from the first air speed controller, air detecting sensors, and a control unit. The air detecting sensors(133,136) are installed adjacent to the first and second air speed controllers in order to detect an air flow rate of the supply pipe. The control unit is used for determining the generation of air hunting in the supply pipe by comparing the air flow rate of the supply pipe with a reference air flow rate.
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