发明名称 SUPPORT BAR FOR PROBE CARD
摘要 A support bar for a probe card is provided to minimize thermal deformation of a support bar by forming slots on one surface of the support bar. A support bar(40) for a probe card(10) supports a plurality of probes(50) that come in contact with a pad of an object to be tested to transfer an electrical signal. A plurality of slots(48) are lengthwise formed on one surface of the body(42) of the support bar so that thermal deformation can separately occur in each section of the support bar. The slots can be formed in the lower surface of the body where the probes are installed.
申请公布号 KR100813578(B1) 申请公布日期 2008.03.18
申请号 KR20070007188 申请日期 2007.01.23
申请人 NICTECH CO., LTD. 发明人 JEON, BYUNG HEE;KANG, DAE CHEOL
分类号 H01L21/66 主分类号 H01L21/66
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