| 摘要 |
PROBLEM TO BE SOLVED: To provide a control device for an optical scanner capable of shortening positioning time of a mirror and further improving positioning accuracy of a laser beam. SOLUTION: The control device is provided with a means for detecting a value of motor driving current 29 to be supplied to a moving coil 13, and the value of the motor driving current 29 is inputted to an angular velocity observer circuit 32 and a torsional vibration stabilizing compensation circuit 33. Moreover, an angle detection signal 22 of a rotary shaft 12 by an angle sensor 16 is inputted to a proportional compensation circuit 25 and the angular observer circuit 32 being a differential compensation circuit. Then, a mirror angle detection signal 17e detected by a mirror face 17a, a light emitting element 17b, and a light receiving element 17c is negatively fed back to a target angle value signal 21 outputted from a mirror angle instruction circuit 20; the deviation signal 23 obtained by negatively feeding back and signal 17e to the signal 21 is integrated by an integral compensation circuit 24, and the sum of the output signals from the proportional compensation circuit 25, an angular velocity observer circuit 32, and the torsional vibration stabilizing compensation circuit 33 is subtracted from the output signal of the integral compensation circuit 24 and is used as an control signal to a motor driving circuit 28. |
