| 摘要 |
A device includes a stage (4), a force applying unit (7, 10) arranged to apply a magnetically repulsive force to the stage (4), the force applying unit (7, 10) including a first magnet (9) provided at the stage (4), and a second magnet provided at an end of a movement stroke of the stage (4) so as to face the first magnet (9), a driving unit (5, 6) arranged to drive the stage (4) within the movement stroke, a magnetic-flux reinforcement unit (11, 13) arranged to reinforce magnetic flux of the second magnet, and a magnetic shield (16) arranged to shield the magnetic flux of the second magnet. |
