| 发明名称 |
METHOD FOR EXPELLING GAS POSITIONED BETWEEN A SUBSTRATE AND A MOLD |
| 摘要 |
The present invention is directed towards a method of expelling a gas positioned between a substrate and a mold, the substrate and the mold further having a liquid positioned therebetween.
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| 申请公布号 |
WO2007136832(A3) |
申请公布日期 |
2008.09.25 |
| 申请号 |
WO2007US12071 |
申请日期 |
2007.05.18 |
| 申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
CHOI, BYUNG-JIN;GANAPATHISUBRAMANIAN, MAHADEVAN;CHOI, YEOUNG-JUN;MEISSL, MARIO, J. |
| 分类号 |
B29C59/02;B29C43/00;H01L21/302 |
主分类号 |
B29C59/02 |
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