| 摘要 |
A substrate processing apparatus is provided to extend the lifespan by preventing the outflow of the process fluid from the bath. A substrate processing apparatus comprises a bath portion(10), and a brushing part(30) and a leak prevention unit(40). The bath portion provides the work space performing the substrate processing process. The brushing part has an axis of rotation(31) and a brush(35). The axis of rotation passes through axle holes(13,17) of the side wall of the bath portion. The brush is connected to the axis of rotation and blushes the surface of substrate. The leak prevention unit has a rotational plate(51) and a blade(55). The rotational plate is connected to the axis of rotation and rotates with the axis of rotation. The blade is connected to the rotational plate and injects the air into the axle holes of the side wall of the bath portion.
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