发明名称 LIGHT ALIGNMENT DEVICE AND LIGHT ALIGNMENT METHOD
摘要 PROBLEM TO BE SOLVED: To improve productivity and enhance quality in light alignment processing.SOLUTION: A substrate S is mounted on each of two stages 21 and 22 and made to pass through a radiation range R on which polarization light is radiated by an irradiation unit 1 and the two stages 21 and 22 are made to reciprocate alternately by a stage movement mechanism 3. A control unit 4 for controlling the stage movement mechanism 3 maintains certain constant set passage speed that is slow speed when each of the stages 21, 22 passes through the radiation range R. Regarding movement between a first substrate recovery position and the radiation range R of the first stage 21 and movement between a second substrate recovery position and the radiation range R of the second stage 22, the control unit performs movement at a set conveyance speed that is fast speed.SELECTED DRAWING: Figure 7
申请公布号 JP2016110049(A) 申请公布日期 2016.06.20
申请号 JP20150060152 申请日期 2015.03.23
申请人 USHIO INC 发明人 ISHII KAZUMASA
分类号 G02F1/1337 主分类号 G02F1/1337
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