发明名称 LASER PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a laser processing device capable of positioning a condensation spot of a laser beam condensed by a condenser on one end of a water column by transmitting through a transparent plate.SOLUTION: Laser beam irradiation means 5 comprises laser beam oscillation means 51, a condenser 63 and a water column forming mechanism 64. The water column forming mechanism comprises a high pressure water chamber forming housing 65 and high pressure water supply means 66, and an upper wall 651 for constituting the high pressure water chamber forming housing is provided with a window 651a composed of a transparent plate for transmitting the condensed laser beam, and a lower wall 652 for constituting the high pressure water chamber forming housing is formed with a jetting hole 652a for forming a filamentous water column by high pressure water supplied to a high pressure water chamber, and a plane of a flat convex lens 654 is placed on an upper surface of the window composed of the transparent plate provided on the upper wall, and a projection part is oppositely arranged to the condenser, and the projection part of the flat convex lens is formed in a radius of curvature of becoming a curved surface orthogonal to the condensation direction of the laser beam condensed by the condenser.SELECTED DRAWING: Figure 2
申请公布号 JP2016132015(A) 申请公布日期 2016.07.25
申请号 JP20150009087 申请日期 2015.01.21
申请人 DISCO ABRASIVE SYST LTD 发明人 MORISHIGE YUKIO
分类号 B23K26/146;H01L21/301 主分类号 B23K26/146
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