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发明名称
FREQUENCY MODULATION ELLIPSOMETRY METHOD
摘要
申请公布号
SU1060955(A1)
申请公布日期
1983.12.15
申请号
SU19823438772
申请日期
1982.05.14
申请人
INST PRIKLADNOJ FIZ AN BSSR
发明人
KONEV VLADIMIR A,SU;PUNKO NIKOLAJ N,SU;LYUBETSKIJ NIKOLAJ V,SU;TIKHANOVICH SERGEJ A,SU
分类号
G01J4/04;(IPC1-7):G01J4/04
主分类号
G01J4/04
代理机构
代理人
主权项
地址
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