发明名称 TEMPERATURE REGULATOR AND ASSEMBLY APPARATUS EQUIPPED WITH THIS TEMPERATURE REGULATOR
摘要 PURPOSE:To cool a whole work uniformly and quickly and avoid development of crackings in chips by a method wherein a plurality of temperature regulating blocks are provided along the transfer passage of the work and the temperatures of the blocks are varied step by step toward the direction of the transfer of the work. CONSTITUTION:A temperature regulator 15 is composed of a plurality of heat blocks 13, i.e., temperature regulating blocks 16, which are made of material with excellent heat conducting properties and arranged in one row. A work 14 is transferred on the blocks 16 while being contacted with them and the temperatures of the temperature regulating blocks 16 are reduced step by step along the direction of the transfer of the work 14. Therefore, during the work 14 is transferred from the 1st temperature block 16 to the last temperature block 16, the work 14 is cooled down, for instance from 450 deg.C to a room temperature, in a very short time. Moreover, as the work 14 is cooled uniformly from the bottom surface by heat transfer cooling, degradation of quality such as crackings in chips caused by nonuniformity of cooling can be avoided.
申请公布号 JPS62249427(A) 申请公布日期 1987.10.30
申请号 JP19860092167 申请日期 1986.04.23
申请人 HITACHI TOBU SEMICONDUCTOR LTD;HITACHI LTD 发明人 YAMAGATA TOSHIO;OTANI JUNICHI
分类号 H01L23/02;H01L21/50;H01L21/60 主分类号 H01L23/02
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