MULTIPLE WAVELENGTH SURFACE EMITTING LASER AND FABRICATION METHOD THEREOF

摘要

PURPOSE: A multiple wavelength surface emitting laser and a fabrication method thereof are provided, which have a high reliability and a simple fabrication process, by controlling a resonant frequency by an optical coating method using an optical depositor. CONSTITUTION: The multiple wavelength surface emitting laser includes a substrate(20), and the first and the second surface emitting laser(30,40) which are formed by a continuous fabrication method on the substrate and generate lights of different wavelength(lambda1,lambda2) respectively. And a bottom electrode(29) used in the first and the second surface emitting laser in common is formed on a bottom surface of the substrate. The substrate is formed with a semiconductor material like GaAs and InP containing n-type impurity. The first and the second surface emitting laser includes a bottom reflection layer(21), an active layer(23) and a middle layer(25) formed in sequence toward the substrate. And a top electrode(27) having a window(27a) is formed on the middle layer. And the surface emitting lasers comprise the first and the second dielectric reflector layer(31,41) formed on the top electrode. The bottom reflector layer is a DBR(Distributed Bragg Reflector) and is doped with the same impurity type as the substrate. The active layer has a multiple quantum well structure or a supper lattice structure.