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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0429354(A)
申请公布日期
1992.01.31
申请号
JP19900133833
申请日期
1990.05.25
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
NISHIZAWA HIROTAKA;MIYAMA MASANORI;AZUMA SEIICHIRO;KASAHARA OSAMU;SUZUKI SHINICHI
分类号
H01L29/73;H01L21/331;H01L21/76;H01L29/732
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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