申请人 |
DAINIPPON SCREEN MFG. CO., LTD., KYOTO, JP |
发明人 |
SAKAI, TAKAMASA, C/O DAINIPPON SCREEN MFG.CO., FUSHIMI-KU, KYOTO, JP;KOUNO, MOTOHIRO, C/O DAINIPPON SCREEN MFG.CO., FUSHIMI-KU, KYOTO, JP;HIRAE, SADAO, C/O DAINIPPON SCREEN MFG. CO, FUSHIMI-KU, KYOTO, JP;NAKATANI, IKUYOSHI, C/O DAINIPPON SCREEN MFG.CO., FUSHIMI-KU, KYOTO, JP |