| 摘要 |
PROBLEM TO BE SOLVED: To obviate the replacement of a cantilever at positioning time and cutting work time by arranging a positioning marker on a workpiece surface, and impressing a load by contacting a probe with a sample after the probe is positioned on the sample in a noncontact condition. SOLUTION: A positioning marker 106 is arranged in a prescribed place of a workpiece 102 on a base board 101. A probe 103 is relatively moved in the xy direction in a workpiece surface still in a noncontact condition to the workpiece 102 from an initial condition (a), and the positioning marker 106 is detected (b), and next, the probe 103 is moved to a prescribed position to perform fine working on the workpiece 102 with a position of the positioning marker 106 as a reference, and positioning finishes (c). Next, a driving element 105 is driven so that repulsive force of the prescribed magnitude acts between the probe 103 tip and the workpiece, and is pushed in the workpiece up to reaching the probe tip (d, e). Afterwards, cutting work of the workpiece is performed (f). |
