发明名称 BOARD TREATMENT EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide a board treatment equipment wherein disconnections of a power feeder line and leakages can be prevented. SOLUTION: A board carrying mechanism 10 has a pair of carrying arms 21, 22 for retaining and carrying a board and a drive unit 17 for moving a pair of the carrying arms 21, 22 along a board carrying path. In the drive unit 17, a battery 50 for supplying electric power to motors 26, 27 of the carrying arms 21, 22 is arranged. The battery 50 is constituted such that charging is performed by bringing a terminal 51 for charging in the drive unit 17 into contact with a terminal 53 for charge in a charging part 52.
申请公布号 JPH10340941(A) 申请公布日期 1998.12.22
申请号 JP19970165306 申请日期 1997.06.06
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 NISHIMURA KAZUHIRO;MORITA AKIHIKO
分类号 B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65G49/07
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