| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron emission element with an excellent electron emission characteristic by using a carbon material as a material of for electron emission. SOLUTION: In a manufacturing method of an electron emission element, wherein a couple of an emitter electrode and a gate electrode provided oppositely to each other on a substrate 1 are constructed with slit formed in conductive films 2, 3 composed of carbon or carbon compound, a conductive probe is provided, a potential is given to between the probe and the conductive films 2, 3 so that the probe is scanned, a part of the conductive films 2 and 3 is disappeared, and the slit (an electron emission part 6) is formed.</p> |
