发明名称 |
Single-layer-electrode type charge coupled device having double conductive layers for charge transfer electrodes |
摘要 |
In a charge coupled device, a plurality of charge transfer electrodes are formed on a first insulating layer formed on a semiconductor substrate. Each of the charge transfer electrodes is formed by a first conductive layer and a second conductive layer narrower than the first conductive layer. A second insulating layer having the same area as the second conductive layer and is formed on the second conductive layer. A sidewall insulating layer is formed on sidewalls of the second insulating layer and the second conductive layer.
|
申请公布号 |
US6165908(A) |
申请公布日期 |
2000.12.26 |
申请号 |
US20000535734 |
申请日期 |
2000.03.27 |
申请人 |
NEC CORPORATION |
发明人 |
HATANO, KEISUKE;NAKASHIBA, YASUTAKA |
分类号 |
H01L29/762;H01L21/339;H01L27/148;H01L29/768;(IPC1-7):H01L21/00 |
主分类号 |
H01L29/762 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|