| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat-resistant insulating film which is excellent in all of thermal characteristics, electric characteristics, physical characteristics and mechanical characteristics in the field of semiconductors and especially has an extremely low dielectric constant. SOLUTION: This coating varnish characterized by comprising (1) one or more kinds of polybenzoxazole precursors each having repeating units represented by general formula (A) [(n) is an integer of 0 to 1,000; R1 to R4 are each H or a monovalent organic group; X is a group selected from groups represented by formula (B); Y is a group selected from groups represented by formula (C); Z1 and Z2 are each a group selected from groups represented by formula (D); as to formulae (B), (C) and (D), refer to the specification], (2) an organic compound having a thermal decomposition temperature of 200 to 400 deg.C, and (3) an organic solvent capable of simultaneously dissolving or dispersing the components (1) and (2), and the insulating film.
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