| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring instrument with a simple structure and a measuring method therefore, capable of measuring the shapes of both faces of a measuring object with high accuracy with the measuring object kept horizontal in the same way as it is used, without turning it over nor using interference. SOLUTION: This three-dimensional shape measuring instrument is provided with an upper-surface optical probe for scanning an upper surface of the measuring object and a lower-surface optical probe for scanning a lower surface thereof, on an upper stage R and on a lower stage R, respectively, in a horizontal R-axis direction, and at the same time, on an upper stage Z and on a lower stage Z, respectively, in a vertical Z-axis direction. The measuring object is horizontally placed on a stageθin aθ-axis direction making a component of rotation around the Z-axis. Further, the instrument is equipped with a position detecting means for detecting the scanning positions of the two optical probes and the angle of rotation of the measured object around theθaxis and an motion error detecting means for detecting motion errors due to the scanning of the optical probes and the rotation of the measuring object. The shape of the measuring object is calculated from the detection results of the position detecting means and of the motion error detecting means.
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