| 摘要 |
PROBLEM TO BE SOLVED: To solve such problems that suction force is gradually weakened even when a small gap is generated between a conventional substrate support by vacuum suction and a substrate, possibly resulting in the dropping of the substrate, and the substrate is applied with a local load and might be broken starting from foreign matter when the foreign matter, e.g. glass refuse, is inserted between the substrate and the substrate support. SOLUTION: This substrate holder is provided with a suction plate 2 for holding the substrate 3, a plurality of fine holes 4 formed on the suction plate, a vent hole 5 larger in diameter than the fine holes and temporarily sealed with a resin or the like, and a void section 7 storing a liquid 8. A plurality of fine holes and the vent hole are communicated with the void section. In the holding method for the substrate, the substrate is mounted to cover a plurality of fine holes of the suction plate, the liquid stored in the void section is heated, a liquid membrane 10 is seeped from the fine holes between the substrate and the suction plate, and the substrate is sucked and held on the suction plate by the surface tension of the liquid membrane. |
