发明名称 |
Boat for heat treatment and vertical heat treatment equipment |
摘要 |
The present invention is a boat for a thermal process including: a plurality of pillars; a plurality of claws formed in each of the pillars in a height direction at predetermined intervals; a plurality of supporting plates mounted in a tier-like manner between the plurality of pillars via the claws, each supporting plate having an object-to-be-processed mounting surface on which an object to be processed can be mounted; and a groove and a through hole provided in the object-to-be-processed mounting surface. According to the present invention, the groove and the through hole provided in the object-to-be-processed mounting surface form an air layer between the object-to-be-processed mounting surface of the supporting plate and the object to be processed, so that sticking of the object to be processed can be inhibited. Thus, even during a thermal process at a high temperature, generation of slip caused by the sticking of the object to be processed can be inhibited.
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申请公布号 |
US2005042568(A1) |
申请公布日期 |
2005.02.24 |
申请号 |
US20040500125 |
申请日期 |
2004.06.25 |
申请人 |
IRIE SHINJI;SAKAI HIROFUMI |
发明人 |
IRIE SHINJI;SAKAI HIROFUMI |
分类号 |
C23C16/458;C23C16/46;H01L21/00;H01L21/205;H01L21/22;H01L21/31;H01L21/673;H01L21/683;(IPC1-7):F27D5/00 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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