RESISTANCE HEATING TYPE EFFUSION CELL

摘要

PURPOSE: A resistance heating type effusion cell using a plate shaped heater of which upper and lower parts have different areas is provided to remove aggregation of raw materials at the upper part of a crucible and uniformly heat the raw materials. CONSTITUTION: The resistance heating type effusion cell comprises a crucible(2) into which a solid raw material for thin film deposition is charged; a heater(10) which is closely adhered to the crucible and formed in a plate shape, and which has a small area of the upper part and a large area of the lower part; a support(4) which supports the heater and cuts off heat radiation into the lower part; a heat shielding plate(6) which envelops the outer part of the crucible and heater, and cuts off heat radiation into the outside, wherein the heater is made of a tungsten or tantalum thin plate, and the heater is formed in a serpentine shape so that the heater is repeatedly bended in zigzag along a length direction of the crucible.