发明名称 |
Patterned thin film graphite devices and method for making same |
摘要 |
In a method of making graphite devices, a preselected crystal face of a crystal is annealed to create a thin-film graphitic layer disposed against selected face. A preselected pattern is generated on the thin-film graphitic layer. A functional structure includes a crystalline substrate having a preselected crystal face. A thin-film graphitic layer is disposed on the preselected crystal face. The thin-film graphitic layer is patterned so as to define at least one functional structure.
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申请公布号 |
US7327000(B2) |
申请公布日期 |
2008.02.05 |
申请号 |
US20050302868 |
申请日期 |
2005.12.14 |
申请人 |
GEORGIA TECH RESEARCH CORP. |
发明人 |
DEHEER WALT A.;BERGER CLAIRE;FIRST PHILLIP N. |
分类号 |
H01L23/62;B32B9/00;H01L;H01L21/04;H01L21/302;H01L21/461;H01L29/16;H01L29/772 |
主分类号 |
H01L23/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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