发明名称 Patterned thin film graphite devices and method for making same
摘要 In a method of making graphite devices, a preselected crystal face of a crystal is annealed to create a thin-film graphitic layer disposed against selected face. A preselected pattern is generated on the thin-film graphitic layer. A functional structure includes a crystalline substrate having a preselected crystal face. A thin-film graphitic layer is disposed on the preselected crystal face. The thin-film graphitic layer is patterned so as to define at least one functional structure.
申请公布号 US7327000(B2) 申请公布日期 2008.02.05
申请号 US20050302868 申请日期 2005.12.14
申请人 GEORGIA TECH RESEARCH CORP. 发明人 DEHEER WALT A.;BERGER CLAIRE;FIRST PHILLIP N.
分类号 H01L23/62;B32B9/00;H01L;H01L21/04;H01L21/302;H01L21/461;H01L29/16;H01L29/772 主分类号 H01L23/62
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