发明名称 Wafer container door with particulate collecting structure
摘要 A substrate container having an enclosure with an access opening for inserting and removing substrates into an interior of the enclosure and a door chassis that is configured to selectively enclose the opening, the door chassis comprising a first wall having a peripheral wall extending therefrom. The substrate container includes a latch mechanism that is operably coupled with the chassis, the latch mechanism configured to operably secure the chassis to the opening. The door of the substrate container includes a textured particle capture region wherein particles generated by the latch mechanism and elsewhere are captured by the particle capture region.
申请公布号 US7325698(B2) 申请公布日期 2008.02.05
申请号 US20050108620 申请日期 2005.04.17
申请人 ENTEGRIS, INC. 发明人 HALBMAIER DAVID L.
分类号 B65D45/16;B65D25/54;B65D51/24;B65D85/00;B65D85/30;B65D85/86;H01L21/673 主分类号 B65D45/16
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