发明名称 TEST METHOD OF SEMICONDUCTOR DEVICE
摘要 A test method of the semiconductor device is provided to cut down the time to be required to test and the time to be required to the contact with pad by using one pad as a common ground. A test pattern(100) comprises the first pad(110), the second pad(120), the first measuring unit(210), the second measuring unit(220) and a switching unit. The switching unit makes the first pad and the second pad to be connected through the first measuring unit when the low potential is applied to the second pad and the high potential is applied to the first pad. The switching unit makes the first pad and the second pad are connected through second measuring unit, when the low potential is applied to the first pad and the high potential is applied to the second pad. The switching unit comprises the first transfer gate(310) and the second transfer gate(320).
申请公布号 KR20090021632(A) 申请公布日期 2009.03.04
申请号 KR20070086280 申请日期 2007.08.27
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 NOH, YONG JOO;HAN, SANG CHEOL;LEE, KI AM
分类号 H01L21/66 主分类号 H01L21/66
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