Internal chamber rotation motor, alternative rotation

摘要

Embodiments of the present invention generally relate to a rotation device in an RTP chamber. The rotation device includes a cylindrical inner race, a plurality of thrust bearings and a plurality of radial bearings. During operation, the bearings create a gas cushion preventing the rotating parts from contacting the stationary parts.

主权项

1. A rotation device, comprising:
a cylindrical inner race having a thin wall and an annular portion extending from the thin wall, wherein a cylindrical surface of the thin wall is perpendicular to a flat surface of the annular portion; a plurality of porous thrust bearings disposed adjacent the flat surface of the annular portion in a first spaced relationship permitting rotation of the cylindrical inner race relative to the plurality of porous thrust bearings; a plurality of porous radial bearings disposed adjacent the cylindrical surface of the thin wall in a second spaced relationship permitting rotation of the cylindrical inner race relative to the plurality of porous radial bearings; a stationary support ring securing the plurality of porous thrust bearings in the first spaced relationship and securing the plurality of porous radial bearings in the second spaced relationship, wherein each porous radial bearing is secured between two porous thrust bearings; a substrate support surface secured to the cylindrical inner race; and a linear arc motor engaging the cylindrical inner race.