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发明名称
SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH03238865(A)
申请公布日期
1991.10.24
申请号
JP19900034478
申请日期
1990.02.15
申请人
FUJI ELECTRIC CO LTD
发明人
IRIE YUKIHIRO
分类号
H01L29/43;C23C18/31;H01L21/28
主分类号
H01L29/43
代理机构
代理人
主权项
地址
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