发明名称 VOLTAGE IMAGING SYSTEM USING ELECTRO-OPTICS
摘要 A two-dimensional image of the voltage distribution across a surface at a large plurality voltage test points of a panel under test (14) is extracted by illuminating the surface with an input beam (24) of optical energy through an electro-optic modulator (30) wherein the modulator (30) is disposed to allow longitudinal probing geometries such that a voltage differential on the surface of the panel under test (14) causes a power modulation in the optical energy which can be observed through an area optical sensor (a camera) (48) for use to directly produce a two-dimensional spatially-dependent power modulation image directly representative of the spatially corresponding differential voltage state on the surface of the panel under test (14). Surface cross-talk is minimized by placing the face of the modulator (30) closer to the panel under test (14) than the spacing of voltage sites in the panel under test (14). The device may operate in a pass-through mode or in a reflective mode.
申请公布号 WO9215021(A1) 申请公布日期 1992.09.03
申请号 WO1992US00350 申请日期 1992.01.14
申请人 PHOTON DYNAMICS, INC. 发明人 HENLEY, FRANCOIS, J.
分类号 G01R19/00;G01R15/24;G01R31/302;G01R31/308;G02F1/13;G02F1/1343 主分类号 G01R19/00
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