| 摘要 |
PURPOSE:To simplify work, which is complicated in the conventional method due to necessity for replacing a sample bed from polishing to observation, in the case of section polishing according to the section observation of a semiconductor device. CONSTITUTION:A section polishing sample bed 1 can be directly mounted to a section polishing heavey stone 4, in the case of section polishing, and to an electron microscope adapter in the case of observing a polishing surface by an electron microscope. In order to provide a function thus obtained, the section polishing sample bed 1 is provided with an electron microscope adapter mounting female screw which can be mounted left as it is to both a section polishing sample bed mounting male screw 5 of the section polishing heavy stone 4 and a sample bed mounting male screw of the electron microscope adapter. |
