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经营范围
发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH0661184(A)
申请公布日期
1994.03.04
申请号
JP19920226374
申请日期
1992.08.03
申请人
TOKYO ELECTRON LTD
发明人
KAZAMA KOICHI;KOMINO MITSUAKI
分类号
H01L21/302;C23C14/34;C23C16/505;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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