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发明名称
Vergrabene Struktur für die Isolierung von Inseln aus Silizium.
摘要
申请公布号
DE3689257(T2)
申请公布日期
1994.05.11
申请号
DE19863689257T
申请日期
1986.11.04
申请人
FAIRCHILD SEMICONDUCTOR CORP., CUPERTINO, CALIF., US
发明人
BURTON, GREGORY N., BURLINGAME CALIFORNIA 94010, US
分类号
H01L21/306;H01L21/762;H01L21/763;(IPC1-7):H01L21/306;H01L21/76
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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