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申请公布号
JPH0636411(B2)
申请公布日期
1994.05.11
申请号
JP19890003844
申请日期
1989.01.12
申请人
KOGYO GIJUTSUIN
发明人
KAJANA KYONORI
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L21/768;(IPC1-7):H01L21/28;H01L21/90
主分类号
H01L21/28
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