发明名称 |
Method for making specimen and apparatus thereof |
摘要 |
The present invention is intended to provide a method and an apparatus for making a specimen for use in observation through a transparent electron microscope, including a step for milling part of the specimen into a thin film part, which can be observed through a transparent electron microscope, by scanning and irradiating a focused ion beam onto the specimen, a step for observing a mark for detection of position provided on the specimen as a secondary charged particle image by scanning and irradiating a charged particle beam onto the specimen without irradiating the charged particle beam onto the portion to be milled into the thin film part during the step for milling, and a step for compensating positional drift of the focused ion beam during said step for milling in accordance with a result of the observation. The present invention provides an effect to strikingly raise the efficiency of TEM observation since a specimen for use in TEM observation can be made by precisely milling a thin film part of the specimen even though positional drift of the focused ion beam is caused during milling. <IMAGE> |
申请公布号 |
EP0687897(A1) |
申请公布日期 |
1995.12.20 |
申请号 |
EP19950109035 |
申请日期 |
1995.06.12 |
申请人 |
HITACHI, LTD. |
发明人 |
ITOH, FUMIKAZU;NAKATA, TOSHIHIKO;ISHITANI, TOHRU;SHIMASE, AKIRA;YAMAGUCHI, HIROSHI;KAMIMURA, TAKASHI |
分类号 |
G01B11/06;B23K15/00;C23F4/00;G01N1/28;G01N1/32;H01J37/26;H01J37/28;H01J37/304;H01J37/305;H01J37/317;H01L21/66 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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