| 摘要 |
PURPOSE: To correct the position slippage of an object to be carried which is arranged in receiving means when the object to be carried is carried to the receiving means to be arranged by a method wherein a projection is provided on a face on the support side and/or an opposite face to a face on the support side on supporting means for supporting the object to be carried by one face of its object to be carried, etc. CONSTITUTION: There are provided supporting means 14 for supporting an object to be carried by one face of its object to be carried; and a projection 17 arranged on a face on the support side and/or an opposite face to a face on the support side on supporting means 14. The objects to be carried are arranged sequentially in parallel in a specific position of receiving means. For example, an arm 14 made of planar ceramics is arranged in a moving post 13 of a robot arm 10 and two vacuum chucking holes 15 are arranged at a top end part on an upper surface of the arm 14 to form a chuck part 16 for a wafer. Further, in a position where the width of the arm 14 is divided into two parts, a position correcting pin 17 composed of columnar ceramics which penetrates in a vertical direction from an upper face to a lower face is arranged. |
