| 摘要 |
PURPOSE: To provide tweezers suitable for places where a vacuum line is absence and also a wafer heated at a high temperature for processings in a certain step is clipped, etc. CONSTITUTION: There are provided a tweezers body 1 made of a metal which is formed with a pair of vertical opening and closing arms 2, 3 including a free end portion that base terminal sides are coupled to each other and top end sides are released; and vertical clipping surface plates 5, 6 made of plastics respectively mounted integral with the inner surface of the top end side of the tweezers body 1. The clipping surface plates 5, 6 are structured with heat- resistant resin materials that they are not changed in physical properties in chemicals-resistant characteristics and corrosion-resistant characteristics even at least at a continuous use temperature 250 deg.C, and they can be used continuously even at least at a high temperature of 350 deg.C. Further, the clipping surface plates 5, 6 are adhered to the tweezers body 1 made of a metal at a high temperature by burning via heat-resistant adhesives. |
