| 摘要 |
PROBLEM TO BE SOLVED: To obtain a magnetic thin film for a magnetic head having both of large saturation magnetic flux density and high magnetic permeability and having excellent corrosion resistance by constituting the thin film of a substrate and an iron alloy layer formed on the substrate and forming the iron alloy layer having a specified compsn. of Cr, Al, Si by vapor deposition in an Ar atmosphere. SOLUTION: This magnetic thin film consists of a ceramic substrate 1, an iron alloy layer 2 formed by vapor deposition in an Ar atmosphere on the substrate 1, and a SiO2 protective film 3 formed thereon. The iron alloy layer 2 has a compsn. of 0.5 to 3 wt.% Cr, 2 to 6 wt.% Al, and 4 to 8 wt.% Si. As for the substrate 1, not only a ceramic material but other materials having an almost same coefft. of expansion can be used. It is preferable that the obtd. magnetic thin film has 1.4 to 1.6 T saturation magnetic flux density and <=2×10<-6> absolute saturation magnetostriction.
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