发明名称 |
MATERIAL WITH PATTERN SURFACE FOR USE AS TEMPLATE AND PROCESS FOR PRODUCING THE SAME |
摘要 |
According to the present invention, there can be obtained an anisotropic material comprising an alternating-line pattern and a layer of a functional compound formed on the surface of the alternating-line pattern, wherein one type of lines is made of a fluorine-containing compound and the other type of lines is made of a non-fluorinated compound in the alternating-line surface. When using, as a template, a pattern surface produced by using a fluorine compound having a specific structure as a surface-treating agent, a structure of a functional compound of nanometer to micrometer order can be produced by a process of applying a functional compound solution. Properties of a functional compound can be improved by using, as a template, a pattern surface, at least one region of which is surface-treated with a fluorine compound having a specific structure. <IMAGE> |
申请公布号 |
EP1551066(A1) |
申请公布日期 |
2005.07.06 |
申请号 |
EP20030797648 |
申请日期 |
2003.09.18 |
申请人 |
DAIKIN INDUSTRIES, LTD. |
发明人 |
MORITA, MASAMICHI;OTSUKA, HIDEYUKI;TAKAHARA, ATSUSHI;YAMAMOTO, IKUO;ITAMI, YASUO;AOYAMA, HIROKAZU |
分类号 |
H01L51/00;G03F7/00;G03F7/004;G03F7/075;H01L51/40;(IPC1-7):H01L51/00 |
主分类号 |
H01L51/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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