发明名称 MATERIAL WITH PATTERN SURFACE FOR USE AS TEMPLATE AND PROCESS FOR PRODUCING THE SAME
摘要 According to the present invention, there can be obtained an anisotropic material comprising an alternating-line pattern and a layer of a functional compound formed on the surface of the alternating-line pattern, wherein one type of lines is made of a fluorine-containing compound and the other type of lines is made of a non-fluorinated compound in the alternating-line surface. When using, as a template, a pattern surface produced by using a fluorine compound having a specific structure as a surface-treating agent, a structure of a functional compound of nanometer to micrometer order can be produced by a process of applying a functional compound solution. Properties of a functional compound can be improved by using, as a template, a pattern surface, at least one region of which is surface-treated with a fluorine compound having a specific structure. <IMAGE>
申请公布号 EP1551066(A1) 申请公布日期 2005.07.06
申请号 EP20030797648 申请日期 2003.09.18
申请人 DAIKIN INDUSTRIES, LTD. 发明人 MORITA, MASAMICHI;OTSUKA, HIDEYUKI;TAKAHARA, ATSUSHI;YAMAMOTO, IKUO;ITAMI, YASUO;AOYAMA, HIROKAZU
分类号 H01L51/00;G03F7/00;G03F7/004;G03F7/075;H01L51/40;(IPC1-7):H01L51/00 主分类号 H01L51/00
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