METHOD FOR PRODUCTION OF SYNTHETIC QUARTZ GLASS, OPTICAL MEMBER, PHOTOLITHOGRAPHY MACHINE, AND APPARATUS FOR PRODUCTION OF SYNTHETIC QUARTZ GLASS

摘要

PROBLEM TO BE SOLVED: To provide a method of and a device for producing a synthetic quartz glass capable of easily improving the homogeneity of refractive index or strain.

SOLUTION: The production device for the synthetic quartz glass is provided with: a hollow synthesizing furnace 10; a burner 11 for forming flame by jetting a silicon compound and a combustion gas in the furnace 10; and a target 12 for growing a deposition intermediate 14 having the depositional face 14a of a protruding form by depositing glass particulates generated in the flame. Further, a heat shield member 13 for controlling spread of the flame is provided around the peripheral edge side of the depositional face 14a.

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