CORRECTION METHOD FOR MEASURED VALUES OF LASER INTERFEROMETER, MOVING METHOD FOR TABLE AND DEVICE THEREOF, LASER BEAM MACHINING METHOD AND DEVICE THEREOF, AND CORRECTION METHOD FOR POSITION MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a correction method for measurement values of a laser interferometer that does not require a laser interferometer for correcting measurement values, other than a laser interferometer where the measurement values are corrected, and that has a different structure from the conventional structures.

SOLUTION: The correction method for measurement values of a laser interferometer comprises the steps of (a) determining the moved distance by moving a moving table only a first distance and therewith measuring the starting position and the ending position for the movement of the moving table, and (b) obtaining correction information for correcting the laser interferometer, based on the movement distance determined with the laser interferometer and the first distance.

COPYRIGHT: (C)2007,JPO&INPIT