| 摘要 |
A crystal sensor and a deposition apparatus of an organic light emitting device having the same are provided to protect the crystal sensor from a thermal shock by installing a cooling device in the crystal sensor. A deposition apparatus of an organic light emitting device includes a chamber(100), a stage(200), a deposition vessel(300), a heating apparatus(400) and a crystal sensor(500). The stage(200) is mounted inside the chamber(100). The mounting vessel(300) is placed on the stage(200), and stores deposition material inside. The heating apparatus(400) is placed on the stage(200), and heats the deposition vessel(300). The crystal sensor(500) is placed in a position where the deposition material is deposited. The crystal sensor(500) includes a cover which has a cooling coil line, a sensor rotation motor which is placed inside the cover, and a sensor unit which is placed inside the cover and is connected to the sensor rotation motor. |
